In situ Surface Passivation of Gallium Nitride for...

IEEE Transactions on Electron Devices 2011 Vol. 58; Iss. 1

In situ Surface Passivation of Gallium Nitride for Metal–Organic Chemical Vapor Deposition of High-Permittivity Gate Dielectric

Xinke Liu, Hock-Chun Chin, Leng-Seow Tan, Yee-Chia Yeo
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Volume:
58
Year:
2011
Language:
english
Pages:
8
DOI:
10.1109/ted.2010.2084410
File:
PDF, 1.37 MB
english, 2011
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