A Novel Method to Improve Laser Anneal Worsened Negative...

IEEE Transactions on Electron Devices 2011 Vol. 58; Iss. 3

A Novel Method to Improve Laser Anneal Worsened Negative Bias Temperature Instability in 40-nm CMOS Technology

Ming-Shing Chen, Yean-Kuen Fang, Feng-Renn Juang, Yen-Ting Chiang, Cheng-I Lin, Tung-Hsing Lee, Chou, S., Ning, J.
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Volume:
58
Year:
2011
Language:
english
Pages:
5
DOI:
10.1109/ted.2010.2102358
File:
PDF, 564 KB
english, 2011
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