A Novel Nanoinjection Lithography (NInL) Technology and Its...

IEEE Transactions on Electron Devices 2011 Vol. 58; Iss. 11

A Novel Nanoinjection Lithography (NInL) Technology and Its Application for 16-nm Node Device Fabrication

Hou-Yu Chen, Chun-Chi Chen, Fu-Kuo Hsueh, Jan-Tsai Liu, Shyi-Long Shy, Cheng-San Wu, Chao-Hsin Chien, Chenming Hu, Chien-Chao Huang, Fu-Liang Yang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
58
Year:
2011
Language:
english
Pages:
9
DOI:
10.1109/ted.2011.2163938
File:
PDF, 1.04 MB
english, 2011
Conversion to is in progress
Conversion to is failed