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Variable Ramp Rate Breakdown Experiments and the Role of Metal Injection in Low- Dielectrics
Plawsky, J.L., Borja, J., Williams, B., Riley, M.J., Gill, W.N.Volume:
58
Year:
2011
Language:
english
Pages:
7
DOI:
10.1109/ted.2011.2168228
File:
PDF, 415 KB
english, 2011