Self-Annealing Effect of Tensile Liner on Thick-Tinv PMOS

IEEE Transactions on Electron Devices 2011 Vol. 58; Iss. 12

Self-Annealing Effect of Tensile Liner on Thick-Tinv PMOS

Qintao Zhang, Jie Chen, Sherony, M.J.
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Volume:
58
Year:
2011
Language:
english
Pages:
5
DOI:
10.1109/ted.2011.2169069
File:
PDF, 812 KB
english, 2011
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