Microstructuring of silicon with femtosecond laser pulses

Applied Physics Letters 1998 Vol. 73; Iss. 12

Microstructuring of silicon with femtosecond laser pulses

Her, Tsing-Hua, Finlay, Richard J., Wu, Claudia, Deliwala, Shrenik, Mazur, Eric
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Volume:
73
Year:
1998
Language:
english
DOI:
10.1063/1.122241
File:
PDF, 642 KB
english, 1998
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