High-density oxidized porous silicon
Gharbi, Ahmed, Remaki, Boudjemaa, Halimaoui, Aomar, Bensahel, Daniel, Souifi, AbdelkaderVolume:
27
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/27/10/105017
Date:
October, 2012
File:
PDF, 370 KB
english, 2012