High-density oxidized porous silicon

High-density oxidized porous silicon

Gharbi, Ahmed, Remaki, Boudjemaa, Halimaoui, Aomar, Bensahel, Daniel, Souifi, Abdelkader
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Volume:
27
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/27/10/105017
Date:
October, 2012
File:
PDF, 370 KB
english, 2012
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