A novel ellipsometric set up for high precision thin films...

A novel ellipsometric set up for high precision thin films measurements

J. Monin, H. Sahsah, O. Brevet-Philibert
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Volume:
187
Year:
1995
Language:
english
Pages:
134
DOI:
10.1016/0022-3093(95)00124-7
File:
PDF, 262 KB
english, 1995
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