Volume 187; Issue none

Journal of Non-Crystalline Solids

Volume 187; Issue none
1

Dielectrics in microelectronics — problems and perspectives

Year:
1995
Language:
english
File:
PDF, 721 KB
english, 1995
2

Buried oxides: where we have been and where we are going

Year:
1995
Language:
english
File:
PDF, 977 KB
english, 1995
3

Low-temperature voltage enhanced UV-assisted oxidation of silicon

Year:
1995
Language:
english
File:
PDF, 388 KB
english, 1995
4

Rapid thermal annealing of SiO2 for VLSI applications

Year:
1995
Language:
english
File:
PDF, 342 KB
english, 1995
6

Oxidation of amorphous and crystalline silicon

Year:
1995
Language:
english
File:
PDF, 244 KB
english, 1995
7

Fluorinated interlayer dielectric films in ULSI multilevel interconnections

Year:
1995
Language:
english
File:
PDF, 793 KB
english, 1995
8

RTP — temperature monitoring by means of oxidation

Year:
1995
Language:
english
File:
PDF, 282 KB
english, 1995
10

New substances for atomic-layer deposition of silicon dioxide

Year:
1995
Language:
english
File:
PDF, 265 KB
english, 1995
14

Oxygen-rich phase segregation in PECVD a-SiOx:H semi-insulators

Year:
1995
Language:
english
File:
PDF, 321 KB
english, 1995
18

Boron diffusion in SiO2 based dielectric thin layers

Year:
1995
Language:
english
File:
PDF, 384 KB
english, 1995
40

Atomic hydrogen-induced degradation of thin SiO2 gate oxides

Year:
1995
Language:
english
File:
PDF, 276 KB
english, 1995
41

The role of hydrogen in the action of fluorine in SiSiO2 structures

Year:
1995
Language:
english
File:
PDF, 315 KB
english, 1995
43

Chemical reactions of hydrogenous species in the SiSiO2 system

Year:
1995
Language:
english
File:
PDF, 428 KB
english, 1995
45

Electrical properties of hydrogen-rich SiSiO2 structures

Year:
1995
Language:
english
File:
PDF, 210 KB
english, 1995
47

Structural and bonding properties of amorphous silicon nitride films

Year:
1995
Language:
english
File:
PDF, 622 KB
english, 1995
50

Nature of the Si and N dangling bonds in silicon nitride

Year:
1995
Language:
english
File:
PDF, 270 KB
english, 1995
66

Structural identification of point defects in amorphous silicon oxynitrides

Year:
1995
Language:
english
File:
PDF, 728 KB
english, 1995
69

Electrical properties of Au/Bn/InP MIS diodes

Year:
1995
Language:
english
File:
PDF, 323 KB
english, 1995
74

Photo-assisted switching and trapping in BaTiO3 and Pb(Zr, Ti)O3 ferroelectrics

Year:
1995
Language:
english
File:
PDF, 285 KB
english, 1995
81

Thermo-optic mode extinction modulation in polymeric waveguide structures

Year:
1995
Language:
english
File:
PDF, 207 KB
english, 1995
85

Low pressure chemical vapour deposition of tantalum pentoxide thin layers

Year:
1995
Language:
english
File:
PDF, 297 KB
english, 1995
87

Preface

Year:
1995
Language:
english
File:
PDF, 44 KB
english, 1995
88

Sponsors

Year:
1995
File:
PDF, 23 KB
1995
89

Editorial Board

Year:
1995
Language:
english
File:
PDF, 63 KB
english, 1995
90

Author index

Year:
1995
Language:
english
File:
PDF, 446 KB
english, 1995
91

Subject index

Year:
1995
Language:
english
File:
PDF, 410 KB
english, 1995