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Electronic interface properties of silicon substrates after ozone based wet-chemical oxidation studied by SPV measurements
Heike Angermann, Klaus Wolke, Christiane Gottschalk, Ana Moldovan, Maurizio Roczen, Jens Fittkau, Martin Zimmer, Jochen RentschVolume:
258
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.apsusc.2012.03.170
File:
PDF, 813 KB
english, 2012