Epitaxial growth of orthorhombic SnO2 films on various YSZ substrates by plasma enhanced atomic layer deposition
Sungtae Kim, Dai-Hong Kim, Seong-Hyeon HongVolume:
348
Year:
2012
Language:
english
DOI:
10.1016/j.jcrysgro.2012.03.047
File:
PDF, 1.08 MB
english, 2012