Novel RF process monitoring test structure for silicon...

IEEE Transactions on Semiconductor Manufacturing 2005 Vol. 18; Iss. 2

Novel RF process monitoring test structure for silicon devices

Choon Beng Sia, Beng Hwee Ong, Kok Meng Lim, Kiat Seng Yeo, Manh Anh Do, Jian-Guo Ma, Alam, T.
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Volume:
18
Year:
2005
Language:
english
DOI:
10.1109/tsm.2005.845095
File:
PDF, 1.94 MB
english, 2005
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