Ultraviolet assisted injection liquid source chemical...

Advanced Functional Materials 2000 Vol. 10; Iss. 3-5

Ultraviolet assisted injection liquid source chemical vapour deposition (UVILS-CVD) of tantalum pentoxide

P. V Kelly, M. B Mooney, J. T Beechinor, B. J O'Sullivan, P. K Hurley, G. M Crean, J.-Y Zhang, I. W Boyd, M Paillous, C Jimenez, J.-P Senateur
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Volume:
10
Year:
2000
Language:
english
Pages:
8
DOI:
10.1002/1099-0712(200005/10)10:3/53.0.co;2-#
File:
PDF, 147 KB
english, 2000
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