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Volume 10; Issue 3-5
Main
Advanced Functional Materials
Volume 10; Issue 3-5
Advanced Functional Materials
Volume 10; Issue 3-5
1
Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high-k materials in microelectronic devices. A carbon-free precursor for the synthesis of hafnium dioxide
Ryan C. Smith
,
Tiezhong Ma
,
Noel Hoilien
,
Lancy Y. Tsung
,
Malcolm J. Bevan
,
Luigi Colombo
,
Jeffrey Roberts
,
Stephen A. Campbell
,
Wayne L. Gladfelter
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 340 KB
Your tags:
english, 2000
2
Ultraviolet assisted injection liquid source chemical vapour deposition (UVILS-CVD) of tantalum pentoxide
P. V Kelly
,
M. B Mooney
,
J. T Beechinor
,
B. J O'Sullivan
,
P. K Hurley
,
G. M Crean
,
J.-Y Zhang
,
I. W Boyd
,
M Paillous
,
C Jimenez
,
J.-P Senateur
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 147 KB
Your tags:
english, 2000
3
Photo-MOCVD of copper thin films using Cu(II) and Cu(I) precursors for low-temperature metallization
F Maury
,
S Vidal
,
A Gleizes
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 266 KB
Your tags:
english, 2000
4
CVD of conformal alumina thin films via hydrolysis of AlH3(NMe2Et)
Bradley D. Fahlman
,
Andrew R. Barron
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 691 KB
Your tags:
english, 2000
5
Liquid-delivery MOCVD: chemical and process perspectives on ferro-electric thin film growth
J. F Roeder
,
T. H Baum
,
S. M Bilodeau
,
G. T Stauf
,
C. Ragaglia
,
M. W Russell
,
P. C Van Buskirk
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 129 KB
Your tags:
english, 2000
6
Pulsed injection MOCVD of functional electronic oxides
J-P. Sénateur
,
Catherine Dubourdieu
,
François Weiss
,
M. Rosina
,
A. Abrutis
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 128 KB
Your tags:
english, 2000
7
Deposition of electroceramic thin films by MOCVD
J. Lindner
,
M. Schumacher
,
M. Dauelsberg
,
F. Schienle
,
S. Miedl
,
D. Burgess
,
E. Merz
,
G. Strauch
,
H. Juergensen
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 282 KB
Your tags:
english, 2000
8
MOCVD of perovskite thin films using an aerosol-assisted liquid delivery system
Patrick Schäfer
,
Rainer Waser
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 215 KB
Your tags:
english, 2000
9
An investigation into the growth of magnesium niobium oxide and lead magnesium niobate by liquid-injection MOCVD using a magnesium–niobium alkoxide precursor
Hywell O Davies
,
Anthony C Jones
,
Timothy J Leedham
,
Peter J Wright
,
Michael J Crosbie
,
Penelope A Lane
,
Alexander Steiner
,
Jamie Bickley
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 77 KB
Your tags:
english, 2000
10
Metal-organic chemical vapour deposition of ferro-electric SrBi2Ta2O9 thin films
Chiharu Isobe
,
Katsuyuki Hironaka
,
Shinichi Hishikawa
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 315 KB
Your tags:
english, 2000
11
Preparation of bismuth layer-structured ferroelectric thin films by MOCVD and their characterization
Hiroshi Funakubo
,
Katsuyuki Ishikawa
,
Takayuki Watanabe
,
Masatoshi Mitsuya
,
Norimasa Nukaga
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 653 KB
Your tags:
english, 2000
12
Synthesis and solution decomposition kinetics of flash-vaporizable liquid Barium Beta-diketonates
Roy G Gordon
,
Seán Barry
,
Randy N. R Broomhall-Dillard
,
Daniel J Teff
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 111 KB
Your tags:
english, 2000
13
Metal amides: versatile dopant precursors for electronic materials
Oliver Just
,
William Rees Jr
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 141 KB
Your tags:
english, 2000
14
Substituent effects on the volatility of metal β-diketonates
Bradley D Fahlman
,
Andrew R Barron
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 172 KB
Your tags:
english, 2000
15
Recent developments in the MOCVD of electronic materials
Anthony C Jones
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 35 KB
Your tags:
english, 2000
16
MOCVD of high-k dielectrics, tantalum nitride and copper from directly injected liquid precursors
Yoshihide Senzaki
,
Arthur K. Hochberg
,
John A. T. Norman
Journal:
Advanced Functional Materials
Year:
2000
Language:
english
File:
PDF, 170 KB
Your tags:
english, 2000
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