Furnace N2O oxidation process for submicron MOSFET device...

Solid-State Electronics 1993 Vol. 36; Iss. 5

Furnace N2O oxidation process for submicron MOSFET device applications

Hyunsang Hwang, Ming-yin Hao, Jack Lee, Viju Mathews, Pierre C. Fazan, Chuck Dennison
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Volume:
36
Year:
1993
Language:
english
DOI:
10.1016/0038-1101(93)90245-l
File:
PDF, 302 KB
english, 1993
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