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Vertical Integration of Stacked DRAM and High-Speed Logic Device Using SMAFTI Technology
Kurita, Y., Matsui, S., Takahashi, N., Soejima, K., Komuro, M., Itou, M., Kawano, M.Volume:
32
Year:
2009
Language:
english
DOI:
10.1109/tadvp.2009.2015461
File:
PDF, 3.40 MB
english, 2009