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Theoretical Screening of Candidate Materials for DRAM Capacitors and Experimental Demonstration of a Cubic-Hafnia MIM Capacitor
Mise, N., Ogawa, A., Tonomura, O., Sekiguchi, T., Horii, S., Itatani, H., Saito, T., Sakai, M., Takebayashi, Y., Yamazaki, H., Torii, K.Volume:
57
Year:
2010
Language:
english
DOI:
10.1109/ted.2010.2052715
File:
PDF, 634 KB
english, 2010