Ultimate sub-25 nm gate length NMOSFETs transport at 293 and 77 K
G Bertrand, S Deleonibus, D Souil, C Caillat, G Guegan, S Tedesco, M Heitzmann, P Mur, F BalestraVolume:
28
Year:
2000
Language:
english
Pages:
10
DOI:
10.1006/spmi.2000.0946
File:
PDF, 618 KB
english, 2000