![](/img/cover-not-exists.png)
Nanolithography by electron beam resist-trimming technique
Tatsuro Maeda, Kenichi Ishii, Hiroshi HiroshimaVolume:
28
Year:
2000
Language:
english
Pages:
7
DOI:
10.1006/spmi.2000.0950
File:
PDF, 1.50 MB
english, 2000