Exploration on chemical mechanical planarization of ZnO...

Microelectronic Engineering 2013 Vol. 101; Iss. none

Exploration on chemical mechanical planarization of ZnO functional thin films for novel devices

Kailiang Zhang, Taofeng Zhang, Fang Wang, Yujie Yuan, Yuzhuo Li
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Volume:
101
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.08.007
File:
PDF, 1.18 MB
english, 2013
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