Fabrication of two-dimensional hard X-ray diffraction...

Microelectronic Engineering 2013 Vol. 101; Iss. none

Fabrication of two-dimensional hard X-ray diffraction gratings

S. Rutishauser, M. Bednarzik, I. Zanette, T. Weitkamp, M. Börner, J. Mohr, C. David
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Volume:
101
Year:
2013
Language:
english
DOI:
10.1016/j.mee.2012.08.025
File:
PDF, 843 KB
english, 2013
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