Thickness and temperature dependence of the leakage current in hafnium-based Si SOI MOSFETs
Jiseok Kim, Siddarth A. Krishnan, Sudarshan Narayanan, Michael P. Chudzik, Massimo V. FischettiVolume:
52
Year:
2012
Language:
english
DOI:
10.1016/j.microrel.2012.06.151
File:
PDF, 806 KB
english, 2012