Via high resistance failure analysis of LSI devices induced...

Via high resistance failure analysis of LSI devices induced by multiple factors related to process and design

Takuya Naoe, Hirotaka Komoda, Tamao Ikeuchi, Kohichi Yokoyama
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Volume:
52
Year:
2012
Language:
english
DOI:
10.1016/j.microrel.2012.07.023
File:
PDF, 1.99 MB
english, 2012
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