On designing sub-70-nm semiconductor materials and...

IEEE Transactions on Semiconductor Manufacturing 2002 Vol. 15; Iss. 2

On designing sub-70-nm semiconductor materials and processes

Zhirnov, V.V., Cavin, R.K., Herr, D.J.C., Wooldridge, T.A.
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Volume:
15
Year:
2002
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/66.999587
File:
PDF, 466 KB
english, 2002
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