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Cu Dendrite Formation in Post Trench Etch Cleaning
Heo, Jung Shik, Oh, Jun Hwan, Shin, Hong Jae, Lee, Nae InVolume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.331
File:
PDF, 574 KB
english, 2009