Group III nitride and SiC based MEMS and NEMS: materials...

Journal of Physics D Applied Physics 2007 / 10 Vol. 40; Iss. 20

Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications

Cimalla, V, Pezoldt, J, Ambacher, O
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/20/S19
Date:
October, 2007
File:
PDF, 2.82 MB
english, 2007
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