Modeling the constitutive and frictional behavior of PTFE...

Microelectronic Engineering 2013 / 6 Vol. 106

Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

Sonne, M.R., Hattel, J.H.
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Volume:
106
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.01.049
Date:
June, 2013
File:
PDF, 762 KB
english, 2013
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