Fabrication of $\hbox{Si}_{1 - x}\hbox{Ge}_{x}/\hbox{Si}$...

IEEE Transactions on Electron Devices 2013 / 01 Vol. 60; Iss. 1

Fabrication of $\hbox{Si}_{1 - x}\hbox{Ge}_{x}/\hbox{Si}$ pMOSFETs Using Corrugated Substrates for Improved $I_{\rm ON}$ and Reduced Layout-Width Dependence

Ho, Byron, Xu, Nuo, Wood, Bingxi, Tran, Vinh, Chopra, Saurabh, Kim, Yihwan, Nguyen, Bich-Yen, Bonnin, Olivier, Mazure, Carlos, Kuppurao, Satheesh, Chang, Chorng-Ping, Liu, Tsu-Jae King
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2012.2230175
Date:
January, 2013
File:
PDF, 1.63 MB
english, 2013
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