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Silicided Au/Ni bilayer on p-type [001] silicon for low contact resistance metallization schemes
Badalà, Paolo, Santangelo, Antonello, Pellegrino, Giovanna, Alberti, AlessandraVolume:
107
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.09.009
Date:
July, 2013
File:
PDF, 930 KB
english, 2013