Evaluation of MEMS capacitive accelerometers
Beliveau, A., Spencer, G.T., Thomas, K.A., Roberson, S.L.Volume:
16
Language:
english
Pages:
9
Journal:
IEEE Design & Test of Computers
DOI:
10.1109/54.808209
Date:
January, 1999
File:
PDF, 680 KB
english, 1999