PDMS-Coated Piezoresistive NEMS Diaphragm for Chloroform...

IEEE Electron Device Letters 2012 / 07 Vol. 33; Iss. 7

PDMS-Coated Piezoresistive NEMS Diaphragm for Chloroform Vapor Detection

Guo, Huihui, Lou, Liang, Chen, Xiangdong, Lee, Chengkuo
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Volume:
33
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2012.2195152
Date:
July, 2012
File:
PDF, 299 KB
english, 2012
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