Interface engineering for the TaN/Ta barrier film...

Microelectronic Engineering 2013 / 6 Vol. 106

Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth

Gerlich, Lukas, Ohsiek, Susanne, Klein, Christoph, Geiß, Mario, Friedemann, Michael, Kücher, Peter, Schmeißer, Dieter
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Volume:
106
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.01.017
Date:
June, 2013
File:
PDF, 937 KB
english, 2013
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