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In-situ analysis on the initial growth of ultra-thin ruthenium films with atomic layer deposition
Geidel, Marion, Junige, Marcel, Albert, Matthias, Bartha, Johann W.Volume:
107
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.08.026
Date:
July, 2013
File:
PDF, 948 KB
english, 2013