Improvement of the Performance of TiHfO MIM Capacitors by...

IEEE Electron Device Letters 2008 / 10 Vol. 29; Iss. 10

Improvement of the Performance of TiHfO MIM Capacitors by Using a Dual Plasma Treatment of the Lower Electrode

Cheng, C. H., Pan, H. C., Huang, C. C., Chou, C. P., Hsiao, C. N., Hu, J., Hwang, M., Arikado, T., McAlister, S. P., Chin, Albert
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
29
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2008.2000945
Date:
October, 2008
File:
PDF, 289 KB
english, 2008
Conversion to is in progress
Conversion to is failed