Fabrication of air-bridge sub-micron Schottky junctions on Ge/SOI for THz detection
Bagni, R., Giovine, E., Carta, S., Di Gaspare, A., Casini, R., Ortolani, M., Foglietti, V., Evangelisti, F., Notargiacomo, A.Volume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.04.017
Date:
October, 2013
File:
PDF, 1.01 MB
english, 2013