Volume 110

Microelectronic Engineering

Volume 110

1

Effect of synthesis conditions on the properties of citric-acid coated iron oxide nanoparticles

Li, L., Mak, K.Y., Leung, C.W., Chan, K.Y., Chan, W.K., Zhong, W., Pong, P.W.T.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1022 KB

english, 2013

2

Tube interconnection in polydimethylsiloxane based fluidic microchannels

Martínez-Rivas, Adrian, Mazenq, Laurent, Jalabert, Laurent, Dollat, Xavier, Vieu, Christophe, Séverac, Childérick

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.25 MB

english, 2013

3

Superlens imaging lithography for high aspect ratio sub-wavelength pattern employing trilayer resist process

Fang, Liang, Pan, Li, Wang, Changtao, Luo, Xiangang

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.00 MB

english, 2013

4

High-speed imprinting on plastic optical fibers using cylindrical mold with hybrid microstructures

Mekaru, Harutaka, Ohtomo, Akihiro, Takagi, Hideki, Kokubo, Mitsunori, Goto, Hiroshi

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.16 MB

english, 2013

5

Simple and rapid fabrication of large-area 2D colloidal crystals for nanopatterning of conducting polymers

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.40 MB

english, 2013

6

Fabrication of air-bridge sub-micron Schottky junctions on Ge/SOI for THz detection

Bagni, R., Giovine, E., Carta, S., Di Gaspare, A., Casini, R., Ortolani, M., Foglietti, V., Evangelisti, F., Notargiacomo, A.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013

7

Bulk micromachining of SiC substrate for MEMS sensor applications

Vanko, Gabriel, Hudek, Peter, Zehetner, Johann, Dzuba, Jaroslav, Choleva, Pavlina, Kutiš, Vladimír, Vallo, Martin, Rýger, Ivan, Lalinský, Tibor

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 765 KB

english, 2013

8

Definition of 15nm half pitch grating structures by electron beam lithography double exposure techniques

Bolten, Jens, Koo, Namil, Wahlbrink, Thorsten, Kurz, Heinrich

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.12 MB

english, 2013

9

Super-resolution technique for nanoimprint mold using elastic UV-curable resin

Unno, Noriyuki, Satake, Shin-ichi, Taniguchi, Jun

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.37 MB

english, 2013

10

Three dimensional on 300mm wafer scale nano imprint lithography processes

Landis, S., Reboud, V., Enot, T., Vizioz, C.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.06 MB

english, 2013

11

High aspect ratio pattern collapse of polymeric UV-nano-imprint molds due to cleaning

Finn, Andreas, Lu, Bo, Kirchner, Robert, Thrun, Xaver, Richter, Karola, Fischer, Wolf-Joachim

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 949 KB

english, 2013

12

Comparison of polyurethane and epoxy resist master mold for nanoscale soft lithography

Foncy, Julie, Cau, Jean-Christophe, Bartual-Murgui, Carlos, François, Jean Marie, Trévisiol, Emmanuelle, Sévérac, Childérick

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.53 MB

english, 2013

13

A method for in situ measurement of residual layer thickness in nano-imprint lithography

Hsu, Wei-Hsuan, Hocheng, Hong, Shy, Jow-Tsong

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.36 MB

english, 2013

14

The effects of microfibers on electrical characteristics of zinc oxide thin film transistor

Alahmed, Zeyad A., Yakuphanoglu, Fahrettin

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.00 MB

english, 2013

15

Fabrication of gelatin nanopatterns for cell culture studies

Li, S.S., Shi, J., Liu, L., Li, J.J., Jiang, L.M., Luo, C.X., Kamei, K., Chen, Y.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.26 MB

english, 2013

16

Patterning micro- and nano-structured FePt by direct imprint lithography

Li, Guijun, Dong, Qingchen, Xin, Jianzhuo, Leung, C.W., Lai, P.T., Wong, Wai-Yeung, Pong, Philip W.T.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.21 MB

english, 2013

17

High resolution 3D NanoImprint technology: Template fabrication, application in Fabry–Pérot-filter-array-based optical nanospectrometers

Wang, Xiaolin, Albrecht, Alla, Mai, Hanh H., Woidt, Carsten, Meinl, Tamara, Hornung, Michael, Bartels, Martin, Hillmer, Hartmut

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.77 MB

english, 2013

18

Nanoimprint assisted inkjet printing to fabricate sub-micron channel organic field effect transistors

Teng, Lichao, Plötner, Matthias, Türke, Alexander, Adolphi, Barbara, Finn, Andreas, Kirchner, Robert, Fischer, Wolf-Joachim

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.15 MB

english, 2013

19

Upside and downside views of adherent cells on patterned substrates: Three-dimensional image reconstruction

Li, J.J., Zhou, X.T., Shi, J., Zhang, F., Li, X., Jiang, L.M., Chen, Y.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013

20

Foil-to-foil lamination and electrical interconnection of printed components on flexible substrates

Vásquez Quintero, Andrés, van Remoortere, Bart, Smits, Edsger C.P., van den Brand, Jeroen, Briand, Danick, Schoo, Herman F.M., de Rooij, Nico F.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.24 MB

english, 2013

21

A CNT-MEA compound structure of micro-direct methanol fuel cell for water management

Deng, Huichao, Zhang, Yufeng, Li, Yang, Zhang, Xuelin, Liu, Xiaowei

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.04 MB

english, 2013

22

Fabrication of antireflection structure with antifouling-effect surface by ultraviolet nanoimprint lithography

Yajima, Keita, Adachi, Kaoru, Tsukahara, Yasuhisa, Taniguchi, Jun

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.16 MB

english, 2013

23

Nanostructured plasmonics silicon solar cells

Pudasaini, Pushpa Raj, Ayon, Arturo A.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.84 MB

english, 2013

24

Sub-10nm resolution after lift-off using HSQ/PMMA double layer resist

Rommel, Marcus, Nilsson, Bengt, Jedrasik, Piotr, Bonanni, Valentina, Dmitriev, Alexandre, Weis, Jürgen

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 736 KB

english, 2013

25

Functional oxide nanostructures written by EBL on insulating single crystal substrates

Malowney, J., Mestres, N., Borrise, X., Calleja, A., Guzman, R., Llobet, J., Arbiol, J., Puig, T., Obradors, X., Bausells, J.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.75 MB

english, 2013

26

Functional epoxy polymer for direct nano-imprinting of micro-optical elements

Fader, R., Landwehr, J., Rumler, M., Rommel, M., Bauer, A.J., Frey, L., Völkel, R., Brehm, M., Kraft, A.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.84 MB

english, 2013

27

Development, micro fabrication, and test of flexible magnetic write head for gentelligent applications

Belski, A., Wurz, M.C., Rittinger, J., Rissing, L.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.84 MB

english, 2013

28

Fast and simple fabrication procedure of whole-glass microfluidic devices with metal electrodes

Kotowski, Jaroslav, Navrátil, Vít, Slouka, Zdeněk, Šnita, Dalimil

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 748 KB

english, 2013

29

Fabrication of self-supporting antireflection-structured film by UV–NIL

Abu Talip[a]Yusof, Nurhafizah Binti, Taniguchi, Jun

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.16 MB

english, 2013

30

Patterning of Si nanowire array with electron beam lithography for sub-22nm Si nanoelectronics technology

Sun, Min-Chul, Kim, Garam, Lee, Jung Han, Kim, Hyungjin, Kim, Sang Wan, Kim, Hyun Woo, Lee, Jong-Ho, Shin, Hyungcheol, Park, Byung-Gook

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.75 MB

english, 2013

31

Thermal behavior of wafers and its effects on overlay performance in immersion lithography

Ha, Soon Mok, Ham, Boo-Hyun, Heo, Jinseok, Kim, Hoyeon, Yeo, Jeong-Ho, Park, Joon-Soo, Nam, Suk-Woo

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.42 MB

english, 2013

32

Fabrication of high-resolution conductive lines by combining inkjet printing with soft lithography

Sung, Jisu, Kang, Byung Ju, Oh, Je Hoon

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1016 KB

english, 2013

33

Anti-charging process for electron beam observation and lithography

Aassime, A., Hamouda, F., Richardt, I., Bayle, F., Pillard, V., Lecoeur, P., Aubert, P., Bouchier, D.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.56 MB

english, 2013

34

Zirconia based functional sol–gel resist for UV and high resolution lithography

Della Giustina, Gioia, Garoli, Denis, Romanato, Filippo, Brusatin, Giovanna

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.65 MB

english, 2013

35

Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching

Rommel, M., Rumler, M., Haas, A., Bauer, A.J., Frey, L.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.81 MB

english, 2013

36

High resolution HSQ nanopillar arrays with low energy electron beam lithography

Guerfi, Y., Carcenac, F., Larrieu, G.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.15 MB

english, 2013

37

Photovoltaic properties of n-type SnS contact on the unpolished p-type Si surfaces with and without sulfide treatment

Huang, Chung-Cheng, Lin, Yow-Jon, Liu, Chia-Jyi, Yang, Yao-Wei

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 479 KB

english, 2013

38

Precise ultrafast laser micromachining in thin-film CIGS photovoltaic modules

Chang, Tien-Li, Chen, Chien-Yu, Wang, Chien-Ping

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.47 MB

english, 2013

39

On-chip polychromatic visible light emitters obtained by 3D capillary force assembly

Cordeiro, Julien, Funfschilling, Fabien, Lecarme, Olivier, Dias, Guilherme Osvaldo, Picard, Emmanuel, Peyrade, David

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.06 MB

english, 2013

40

Ring-to-dots transformation of InGaAs quantum rings grown by droplet epitaxy

Pankaow, N., Prongjit, P., Thainoi, S., Panyakeow, S., Ratanathammaphan, S.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.61 MB

english, 2013

41

Effect of SiO2 tunnel layer processes on the characteristics of MONOS charge trap devices with poly-Si channels

Na, Heedo, Oh, Jinho, Lee, Kyumin, Kim, Jonggi, Lee, Sunghoon, Lim, Dong Hyeok, Cho, Mann-Ho, Sohn, Hyunchul

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.01 MB

english, 2013

42

Legitimate domain of a Newtonian behavior for thermal nanoimprint lithography

Teyssèdre, H., Gilormini, P., Landis, S., Régnier, G.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 340 KB

english, 2013

43

Fabrication of bulk and epitaxial germanium field emitter arrays by dry etching techniques

Carta, S., Bagni, R., Giovine, E., Foglietti, V., Evangelisti, F., Notargiacomo, A.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.53 MB

english, 2013

44

Ferromagnetic shadow mask for spray coating of polymer patterns

Keller, Stephan Sylvest, Bosco, Filippo Giacomo, Boisen, Anja

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.58 MB

english, 2013

45

Investigation of various mechanical bending strains on characteristics of flexible monocrystalline silicon nanomembrane diodes on a plastic substrate

Seo, Jung-Hun, Zhang, Yang, Yuan, Hao-Chih, Wang, Yuxin, Zhou, Weidong, Ma, Jianguo, Ma, Zhenqiang, Qin, Guoxuan

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.20 MB

english, 2013

46

Mechanical properties of nickel fabricated by electroplating with supercritical CO2 emulsion evaluated by micro-compression test using non-tapered micro-sized pillar

Nagoshi, Takashi, Chang, Tso-Fu Mark, Tatsuo, Sato, Sone, Masato

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.09 MB

english, 2013

47

Table of Contents

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 154 KB

english, 2013

48

2D and 3D photoresist line roughness characterization

Vaglio Pret, Alessandro, Kunnen, Eddy, Gronheid, Roel, Pargon, Erwine, Luere, Olivier, Bianchi, Davide

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.14 MB

english, 2013

49

Feature development on prepatterned elastomer surfaces upon ion implantation

Sun, Y., Wang, H.Y., Xiong, T., Chu, P.K., Leung, C.W.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 854 KB

english, 2013

50

Atomic layer etching of Al2O3 using BCl3/Ar for the interface passivation layer of III–V MOS devices

Min, K.S., Kang, S.H., Kim, J.K., Jhon, Y.I., Jhon, M.S., Yeom, G.Y.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 595 KB

english, 2013

51

Gate-all-around buckled dual Si nanowire nMOSFETs on bulk Si for transport enhancement and digital logic

Najmzadeh, M., Tsuchiya, Y., Bouvet, D., Grabinski, W., Ionescu, A.M.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 940 KB

english, 2013

52

Actuation voltage signal-shaping for smooth scanning beam locus of a light steering system with a dual-axis analog MEMS pointing mirror

Won, Jong-Seob, Choi, Hae Woon, Park, Jae-Joon, Lee, Seon-Bong

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.54 MB

english, 2013

53

Analysis of ZnO nanorod growth from inclined columnar seed layer

Kim, Myoung-Soo, Lee, Da-Hyeok, Cha, Young-Hwan, O, Beom-Hoan, Lee, Seung-Gol, Park, Se-Geun

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.64 MB

english, 2013

54

Formation of nanoscale reaction field using combination of top-down and bottom-up nanofabricaiton

Yamamoto, Hiroki, Ohnuma, Akira, Ohtani, Bunsho, Kozawa, Takahiro

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 936 KB

english, 2013

55

Nanofabrication 2012

Vieu, C., Martin-Cerclier, C.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 146 KB

english, 2013

56

Deep reactive ion etching of in situ boron doped LPCVD Ge0.7Si0.3 using SF6 and O2 plasma

Kazmi, S.N.R., Salm, C., Schmitz, J.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.31 MB

english, 2013

57

Assembling polystyrenes spheres arrays in specified regions for required nanophotonic structures

Li, Shuhong, Huang, Xia, Zhang, Zhiyou, Shi, Ruiying, Gao, Fuhua, Guo, Yongkang, Zhang, Yixiao, Du, Jinglei

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1005 KB

english, 2013

58

Tailored etching processes for UV-NIL resist material for Si-antireflective surfaces

Plachetka, Ulrich, Kim, Jung Wuk, Khandelwal, Rahul, Windgassen, Horst, Moormann, Christian, Kurz, Heinrich

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 922 KB

english, 2013

59

Plasma etching dynamics of CaxBa1−xNb2O6 (CBN) material

Vigne, S., Munõz, J., Delprat, S., Margot, J., Chaker, M.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.01 MB

english, 2013

60

Magnetic nanostructures for non-volatile memories

Šoltýs, J., Gaži, Š., Fedor, J., Tóbik, J., Precner, M., Cambel, V.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.25 MB

english, 2013

61

Enhanced structural and magnetic ordering of FePt/TiOx bilayers by ion-beam deposition and annealing

Li, Guijun, Leung, Chi Wah, Wu, Yi-Jing, Sun, An-Cheng, Hsu, J.-H., Lai, P.T., Lin, Ko-Wei, Pong, Philip W.T.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.34 MB

english, 2013

62

Nanolithography 2012

Benassayag, G., Daran-Schmidt, E.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 146 KB

english, 2013

63

Refractive index graded anti-reflection coating for solar cells based on low cost reclaimed silicon

Liu, Yufei, Guy, Owen James, Patel, Jash, Ashraf, Huma, Knight, Nick

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.19 MB

english, 2013

64

AFM characterization of annealed nanoimprinted patterns applied to rheological properties measurement of thin polymer films with shear rate control

Rognin, E., Landis, S., Davoust, L.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 531 KB

english, 2013

65

Enhanced charge generation of the ZnO nanowires/PZT hetero-junction based nanogenerator

No, Im-Jun, Jeong, Dae-Yong, Lee, Sunwoo, Kim, Sung-Hyun, Cho, Jin-Woo, Shin, Paik-Kyun

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.42 MB

english, 2013

66

Fabrication of sub 20-nm wide grooves in a quartz mold by space narrowing dry etching

Suzuki, Kenta, Youn, Sung-Won, Wang, Qing, Hiroshima, Hiroshi, Nishioka, Yasushiro

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

67

Effect of annealing temperature on microstructure and magnetism of FePt/TaOx bilayer

Li, Guijun, Leung, Chi Wah, Chen, Ying-Ching, Lin, Ko-Wei, Sun, An-Cheng, Hsu, Jen-Hwa, Pong, Philip W.T.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.26 MB

english, 2013

68

Fabrication of inverse micro/nano pyramid structures using soft UV-NIL and wet chemical methods for residual layer removal and Si-etching

Kim, J.W., Plachetka, U., Moormann, C., Kurz, H.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.34 MB

english, 2013

69

A novel processing procedure for T/UV-NIL with negative tone resists

Dhima, Khalid, Mayer, Andre, Wang, Si, Möllenbeck, Saskia, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.32 MB

english, 2013

70

Out-of-plane bending based on SiN-ion-irradiation and bilayer structures for easy access for micromanipulation

Savenko, Alexey, Yildiz, Izzet, Bøggild, Peter

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.92 MB

english, 2013

71

Simulation model validation of two common i-line photoresists

Partel, S., Urban, G.A., Motzek, K.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.09 MB

english, 2013

72

Direct bonding for the encapsulation of transverse optical gratings

Kalkowski, Gerhard, Benkenstein, Tino, Rothhardt, Carolin, Fuchs, Frank, Zeitner, Uwe

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.36 MB

english, 2013

73

A novel inertial switch with an adjustable acceleration threshold using an MEMS digital-to-analog converter

Ma, Cheng-Wen, Huang, Po-Cheng, Kuo, Jui-Chang, Kuo, Wen-Cheng, Yang, Yao-Joe

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.62 MB

english, 2013

74

Magnetic field assisted microcontact printing: A new concept of fully automated and calibrated process

Cau, Jean-Christophe, Ludovic, Lafforgue, Marie, Nogues, Adriana, Lagraulet, Vincent, Paveau

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.69 MB

english, 2013

75

Control of self-assembly defects in thermal nanoimprint

Mayer, Andre, Papenheim, Marc, Möllenbeck, Saskia, Dhima, Khalid, Wang, Si, Scheer, Hella-Christin

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 970 KB

english, 2013

76

Hollow metallic pyramid plasmonic structures fabricated by direct laser writing and electron beam evaporation

Mu, Jiajia, Li, Jiafang, Li, Wuxia, Luo, Qiang, Gu, Changzhi

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.02 MB

english, 2013

77

Author Index

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 181 KB

english, 2013

78

Polystyrene as a brush layer for directed self-assembly of block co-polymers

Oria, L., Ruiz de Luzuriaga, A., Alduncin, J.A., Perez-Murano, F.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 3.26 MB

english, 2013

79

Seamless joining of porous membrane with thermoplastic microfluidic devices

Wang, Z.F., Seah, Y.P., Wang, Z.P.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.83 MB

english, 2013

80

Micromachining of microfluidic channels in glass by microjoule femtosecond laser pulses

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.19 MB

english, 2013

81

Inductively Coupled Plasma etching of amorphous silicon nanostructures over nanotopography using C4F8/SF6 chemistry

Harvey-Collard, Patrick, Jaouad, Abdelatif, Drouin, Dominique, Pioro-Ladrière, Michel

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.33 MB

english, 2013

82

Inside Front Cover - Editorial Board

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 29 KB

english, 2013

83

Sub-30nm via interconnects fabricated using directed self-assembly

Kato, Hirokazu, Seino, Yuriko, Yonemitsu, Hiroki, Sato, Hironobu, Kanno, Masahiro, Kobayashi, Katsutoshi, Kawanishi, Ayako, Imamura, Tsubasa, Omura, Mitsuhiro, Nakamura, Naofumi, Azuma, Tsukasa

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.05 MB

english, 2013

84

High yield BNNTs synthesis by promotion effect of milling-assisted precursor

Li, Ling, Liu, Xiaowei, Li, Luhua, Chen, Ying

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.26 MB

english, 2013

85

Innovative process chain for the development of wear resistant 3D metal microsystems

Richter, Claudia, Stegemann, Daniel, Vierheller, Anke, Gothsch, Thomas, Finke, Jan Henrik, Kwade, Arno, Müller-Goymann, Christel Charlotte, Dietzel, Andreas, Büttgenbach, Stephanus

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.15 MB

english, 2013

86

Effects of chemical components on the bending properties of micro-sized cantilevers in three types of SU-8

Matsuzaki, Junpei, Ishiyama, Chiemi, Sone, Masato, Higo, Yakichi

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 622 KB

english, 2013

87

FIB milling of single-crystal and sputtered ZnO: SEM and AFM characterization

Notargiacomo, A., Maiolo, L.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.40 MB

english, 2013

88

Study of etching bias modeling and correction strategies for compensation of patterning process effects

Ng, Philip C.W., Tsai, Kuen-Yu, Melvin, Lawrence S.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.19 MB

english, 2013

89

Investigations on the removal mechanisms of diverse alumina based polishing slurries for chemical mechanical polishing of electro-plated NiFe 45/55

Rittinger, J., Cvetkovic, S., Rissing, L.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 680 KB

english, 2013

90

Kinetics of reduction of a RuO2(110) film on Ru(0001) by atomic hydrogen

Ugur, D., Storm, A.J., Verberk, R., Brouwer, J.C., Sloof, W.G.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.25 MB

english, 2013

91

Micro-fabrication of air-bearing grooves onto inner surfaces of fine copper pipes

Horiuchi, Toshiyuki, Suzuki, Yuya

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.52 MB

english, 2013

92

Surface pinning of catalyst nanoparticles for enhanced size and position control of 1D nanostructures growth

Dal Zilio, Simone, Pozzato, Alessandro, Grenci, Gianluca, Sovernigo, Enrico, Tormen, Massimo

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.93 MB

english, 2013

93

Integration of NEMS resonators in a 65nm CMOS technology

Muñoz-Gamarra, J.L., Alcaine, P., Marigó, E., Giner, J., Uranga, A., Esteve, J., Barniol, N.

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.64 MB

english, 2013

94

15days electron beam exposure for manufacturing of large area silicon based NIL master

Thrun, Xaver, Choi, Kang-Hoon, Freitag, Martin, Gutsch, Manuela, Hohle, Christoph, Paul, Jan, Rudolph, Matthias, Steidel, Katja

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.59 MB

english, 2013

95

Quantitative study on removal of SU-8 photoresist patterns by supercritical CO2 emulsion

Chang, Tso-Fu Mark, Ishiyama, Chiemi, Sato, Tatsuo, Sone, Masato

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 786 KB

english, 2013

96

A carbon riveted Pt/Graphene catalyst with high stability for direct methanol fuel cell

Liu, Xiaowei, Duan, Jialin, Chen, Hailong, Zhang, Yufeng, Zhang, Xuelin

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 1.14 MB

english, 2013

97

Microchamber/nanodimple polystyrene surfaces constructing cell aggregates fabricated by thermoset mold-based hot embossing

Choi, Min Jin, Cha, Kyoung Je, Kim, Hyung Woo, Na, Moon-Hee, Lee, Bong-Kee, Hwang, Woonbong, Kim, Dong Sung

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.43 MB

english, 2013

98

Enhanced growth and Cu diffusion barrier properties of thermal ALD TaNC films in Cu/low-k interconnects

Wojcik, Henry, Hossbach, Christoph, Kubasch, Christoph, Verdonck, Patrick, Barbarin, Yohan, Merkel, Ulrich., Bartha, Johann W., Hübner, Rene, Engelmann, Hans-Jürgen, Friedemann, Michael

Journal:

Microelectronic Engineering

Year:

2013

Language:

english

File:

PDF, 2.30 MB

english, 2013

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