Atomic force microscopy growth modeling of SiC buffer...

Atomic force microscopy growth modeling of SiC buffer layers on Si(100) and quality optimization

Ferro, G., Monteil, Y., Vincent, H., Thevenot, V., Tran, Min Duc, Cauwet, F., Bouix, J.

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Volume:

Year:

1996

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.363453

File:

PDF, 2.24 MB

english, 1996

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