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Atomic force microscopy growth modeling of SiC buffer layers on Si(100) and quality optimization
Ferro, G., Monteil, Y., Vincent, H., Thevenot, V., Tran, Min Duc, Cauwet, F., Bouix, J.Volume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363453
File:
PDF, 2.24 MB
english, 1996