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Comparison of polyurethane and epoxy resist master mold for nanoscale soft lithography
Foncy, Julie, Cau, Jean-Christophe, Bartual-Murgui, Carlos, François, Jean Marie, Trévisiol, Emmanuelle, Sévérac, ChildérickVolume:
110
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.102
Date:
October, 2013
File:
PDF, 1.53 MB
english, 2013