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Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams
Jun, D.S., Kutchoukov, V.G., Heerkens, C.T.H., Kruit, P.Volume:
97
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2012.03.024
Date:
September, 2012
File:
PDF, 415 KB
english, 2012