Volume 97

Microelectronic Engineering

Volume 97

1

High mobility CMOS transistors on Si/SiGe heterostructure channels

Jungwoo Oh, Kanghoon Jeon, Se-Hoon Lee, Jeff Huang, P.Y. Hung, Injo Ok, Barry Sassman, Dae-Hong Ko, Paul Kirsch, Raj Jammy

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 476 KB

english, 2012

2

Flexible microassembly methods for micro/nanofluidic chips with an inverted microscope

Zheng Xu, Jun-yao Wang, De-jia Wang, Chong Liu, Yun-liang Liu, Jun-shan Liu, Li-ding Wang

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 928 KB

english, 2012

3

Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gap

Yiming Zhang, Yunda Wang, Ming Cai, Ying Wang, Yilong Hao, Jing Chen

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.15 MB

english, 2012

4

C–V characteristics of epitaxial germanium metal–oxide–semiconductor capacitor on GaAs substrate with ALD Al2O3 dielectric

Shih Hsuan Tang, Chien I. Kuo, Hai Dang Trinh, Mantu Hudait, Edward Yi Chang, Ching Yi Hsu, Yung Hsuan Su, Guang-Li Luo, Hong Quan Nguyen

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 619 KB

english, 2012

5

Ag nanoparticle-based inkjet printed planar transmission lines for RF and microwave applications: Considerations on ink composition, nanoparticle size distribution and sintering time

A. Chiolerio, M. Cotto, P. Pandolfi, P. Martino, V. Camarchia, M. Pirola, G. Ghione

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.78 MB

english, 2012

6

Automatic detection of photoresist residual layer in lithography using a neural classification approach

Issam Gereige, Stéphane Robert, Jessica Eid

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 351 KB

english, 2012

7

Reactive ion etching of polymer materials for an energy harvesting device

Wang, Fei, Bertelsen, Christian, Skands, Gustav, Pedersen, Thomas, Hansen, Ole

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 985 KB

english, 2012

8

Experimental study and modeling of double-surrounding-gate and cylindrical silicon-on-nothing MOSFETs

Chen, Yijian, Kang, Weiling

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 712 KB

english, 2012

9

Sensitivity analysis for accurate determination of PSF parameters

Figueiro, T., Tortai, J.H., Schiavone, P.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.35 MB

english, 2012

10

Scanning probe nanolithography on calixarene

Kaestner, M., Rangelow, I.W.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 718 KB

english, 2012

11

Fabrication of precise copper micro-coils using electrolytic etching

Horiuchi, Toshiyuki, Ishii, Hidetoshi

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.03 MB

english, 2012

12

Filling of nanoscale holes with high aspect ratio by Cu electroplating using suspension of supercritical carbon dioxide in electrolyte with Cu particles

Shinoda, Nao, Shimizu, Tetsuya, Chang, Tso-Fu Mark, Shibata, Akinobu, Sone, Masato

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 731 KB

english, 2012

13

Ordering and modification of nanopores in porous anodic aluminum membranes

Liu, Zhaoqian, Huang, Gaoshan, Li, Menglin, Li, Jinxing, Chen, Yifang, Mei, Yongfeng, Liu, Ran

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 389 KB

english, 2012

14

The quadrupole microelectrode design on a multilayer biochip for dielectrophoretic trapping of single cells

Ibrahim, S. Noorjannah, Murray, Lynn, Nock, Volker, Evans, John J., Alkaisi, Maan M.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 961 KB

english, 2012

15

In-situ grown horizontal carbon nanotube membrane

Guerin, Hoël, Tsamados, Dimitrios, Le Poche, Hélène, Dijon, Jean, Ionescu, Adrian M.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 592 KB

english, 2012

16

Fabrication of MOSFETs by 3D soft UV-nanoimprint

Koo, Namil, Schmidt, Mathias, Mollenhauer, Thomas, Moormann, Christian, Schlachter, Florian, Kurz, Heinrich

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 595 KB

english, 2012

17

Effects of ultra-violet laser irradiation on graphene

Wakaya, Fujio, Teraoka, Tsuyoshi, Kisa, Toshiya, Manabe, Tomoya, Abo, Satoshi, Takai, Mikio

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 532 KB

english, 2012

18

Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTV

Satake, Shin-ichi, Taniguchi, Jun, Kanai, Takahiro, Unno, Noriyuki

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 921 KB

english, 2012

19

A simple and versatile micro contact printing method for generating carbon nanotubes patterns on various substrates

Béduer, A., Seichepine, F., Flahaut, E., Vieu, C.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 753 KB

english, 2012

20

A novel volumetric silicon micropump with integrated sensors

Fuchs, Olivier, Fouillet, Yves, Maubert, Sandrine, Cochet, Martine, Chabrol, Claude, David, Nadine, Médal, Xavier, Campagnolo, Raymond

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 573 KB

english, 2012

21

All-inkjet-printed electrical components and circuit fabrication on a plastic substrate

Kang, Byung Ju, Lee, Chang Kyu, Oh, Je Hoon

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 544 KB

english, 2012

22

Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beams

Jun, D.S., Kutchoukov, V.G., Heerkens, C.T.H., Kruit, P.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 415 KB

english, 2012

23

Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

Waid, Simon, Wanzenboeck, Heinz D., Muehlberger, Michael, Bertagnolli, Emmerich

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 516 KB

english, 2012

24

Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effect

Graczyk, Mariusz, Balaz, Martina, Linke, Heiner, Maximov, Ivan

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 484 KB

english, 2012

25

FIB carving of nanopores into suspended graphene films

Morin, A., Lucot, D., Ouerghi, A., Patriarche, G., Bourhis, E., Madouri, A., Ulysse, C., Pelta, J., Auvray, L., Jede, R., Bruchhaus, L., Gierak, J.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 951 KB

english, 2012

26

Fabrication of Bragg Gratings on LiNbO3 optical waveguides

Ulliac, G., Lecestre, A., Guichardaz, B., Dahdah, J., Baida, F.I., Bernal, M.-P., Courjal, N.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 896 KB

english, 2012

27

Fast detection of triazine herbicides on a microfluidic chip using capillary electrophoresis pulse amperometric detection

Islam, Kamrul, Jha, Sandeep Kumar, Chand, Rohit, Han, Dawoon, Kim, Yong-Sang

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 740 KB

english, 2012

28

An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studies

Löffler, R., Fleischer, M., Kern, D.P.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 615 KB

english, 2012

29

Conduction mechanisms in tungsten-polyoxometalate self-assembled molecular junctions

Velessiotis, D., Douvas, A.M., Dimitrakis, P., Argitis, P., Glezos, N.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 513 KB

english, 2012

30

Lifetime evaluation of release agent for ultraviolet nanoimprint lithography

Yamashita, Daisuke, Taniguchi, Jun, Suzuki, Hokuto

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1000 KB

english, 2012

31

Top down fabricated silicon nanowire networks for thermoelectric applications

Totaro, M., Bruschi, P., Pennelli, G.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 536 KB

english, 2012

32

Tunable Fano resonance in large scale polymer-dielectric slab photonic crystals

Asadi, Reza, Bagheri, Shahin, Khaje, Mahdi, Malekmohammad, Mohammad, Tavassoly, Mohammad-Taghi

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 436 KB

english, 2012

33

Effect of mechanical stimuli on live cells in a pneumatically driven cell trap

Kim, Tae Kyung, Jeong, Ok Chan

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.24 MB

english, 2012

34

Fabrication of a glucose sensor with oscillator circuit using CMOS-MEMS technique

Yang, Ming-Zhi, Dai, Ching-Liang, Hung, Cheng-Bei

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 891 KB

english, 2012

35

A technique for transferring metal nano patterns from a plastic replica mold by using a metal oxide release layer

Unno, Noriyuki, Tamura, Hironobu, Taniguchi, Jun

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 2.24 MB

english, 2012

36

A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticles

Helgert, C., Dietrich, K., Lehr, D., Käsebier, T., Pertsch, T., Kley, E.-B.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 490 KB

english, 2012

37

Preface

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 101 KB

english, 2012

38

Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applications

Sultan, S.M., Clark, O.D., Masaud, T.B., Fang, Q., Gunn, R., Hakim, M.M.A., Sun, K., Ashburn, P., Chong, H.M.H.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 480 KB

english, 2012

39

Ultra thick epoxy-based dry-film resist for high aspect ratios

Wangler, N., Beck, S., Ahrens, G., Voigt, A., Grützner, G., Müller, C., Reinecke, H.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 510 KB

english, 2012

40

Fabrication of MEMS actuators from the BEOL of a 0.25μm BiCMOS technology platform

Kulse, P., Birkholz, M., Ehwald, K.-E., Bauer, J., Drews, J., Haak, U., Höppner, W., Katzer, J., Schulz, K., Wolansky, D.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 567 KB

english, 2012

41

Development of a conductivity microsensor considering electric double layer capacity

Janouš, Jiří, Beránek, Pavel, Přibyl, Michal, Šnita, Dalimil

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 513 KB

english, 2012

42

Microfluidic system for cell mechanics analysis through dielectrophoresis

Guido, Isabella, Xiong, Chunyang, Jaeger, Magnus S., Duschl, Claus

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 275 KB

english, 2012

43

Flame aerosol deposition of TiO2 nanoparticle films on polymers and polymeric microfluidic devices for on-chip phosphopeptide enrichment

Rudin, Thomas, Tsougeni, Katerina, Gogolides, Evangelos, Pratsinis, Sotiris E.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 590 KB

english, 2012

44

Preparation of nanoscale thermal time of flight sensors by e-beam lithography

Kallis, K.T., Vendt, V.V., Küchenmeister, C., Fiedler, H.L.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 577 KB

english, 2012

45

Bio-hybrid tactile sensor for the study of the role of mechanoreceptors in human tactile perception

Cheneler, D., Ward, M.C.L., Anthony, C.J.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 598 KB

english, 2012

46

Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defects

Kirchner, R., Nüske, L., Finn, A., Lu, B., Fischer, W.-J.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 652 KB

english, 2012

47

Selectivity optimisation of biomimetic molecularly imprinted polymer thin films

Boysen, Reinhard I., Li, Shuyan, Chowdhury, Jamil, Schwarz, Lachlan J., Hearn, Milton T.W.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 345 KB

english, 2012

48

Flexible resistive switching memory devices composed of solution-processed GeO2:S films

Chung, Isaac, Cho, Kyoungah, Yun, Junggwon, Kim, Sangsig

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 585 KB

english, 2012

49

Silver lines electrode patterned by transfer printing

Ge, Liangjin, Jay Guo, L., Wang, Xudi, Fu, Shaojun

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 748 KB

english, 2012

50

Microcantilevers encapsulated in fluid wells for sensing in liquids

Venstra, W.J., Wien, W.H., Sarro, P.M., van Eijk, J.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 861 KB

english, 2012

51

Effect of shear stress magnitude on intracellular calcium expression in bone cells

Jeon, Jong Heon, Jeong, Ok Chan

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 929 KB

english, 2012

52

Nanostructuring of silicon substrates for the site-controlled growth of GaAs/In0.15Ga0.85As/GaAs nanostructures

Usman, Muhammad, Alzoubi, Tariq, Benyoucef, Mohamed, Reithmaier, Johann Peter

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 812 KB

english, 2012

53

Piezo-electrically actuated and sensed silicon carbide ring resonators

Mastropaolo, Enrico, Sviličić, Boris, Chen, Tao, Flynn, Brian, Cheung, Rebecca

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 543 KB

english, 2012

54

A rapid and portable sensor based on protein-modified gold nanoparticle probes and lateral flow assay for naked eye detection of mercury ion

Chao, Cheng-Han, Wu, Chung-Shu, Huang, Chung-Chih, Liang, Jie-Chian, Wang, Hsiao-Ting, Tang, Pin-Ting, Lin, Lih-Yuan, Ko, Fu-Hsiang

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 521 KB

english, 2012

55

Fabrication and characterization of sub-500nm channel organic field effect transistor using UV nanoimprint lithography with cheap Si-mold

Teng, Lichao, Kirchner, Robert, Plötner, Matthias, Türke, Alexander, Jahn, Andreas, He, Jian, Hagemann, Falk, Fischer, Wolf-Joachim

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 776 KB

english, 2012

56

Strain microgauge implementation on cylindrical metal substrates

Yang, W., Bonvilain, A., Gustavo, F., Basrour, S.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 340 KB

english, 2012

57

SERS analysis on exosomes using super-hydrophobic surfaces

Tirinato, L., Gentile, F., Di Mascolo, D., Coluccio, M.L., Das, G., Liberale, C., Pullano, S.A., Perozziello, G., Francardi, M., Accardo, A., De Angelis, F., Candeloro, P., Di Fabrizio, E.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 379 KB

english, 2012

58

Gallium arsenide passivation method for the employment of High Electron Mobility Transistors in liquid environment

Sileo, Leonardo, Martiradonna, Luigi, Brunetti, Virgilio, Tasco, Vittorianna, De Vittorio, Massimo

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 587 KB

english, 2012

59

Surface enhanced Raman scattering substrate based on gold-coated anodic porous alumina template

Das, G., Patra, N., Gopalakrishanan, A., Proietti Zaccaria, R., Toma, A., Thorat, S., Di Fabrizio, E., Diaspro, A., Salerno, M.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 745 KB

english, 2012

60

Table of Contents

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 118 KB

english, 2012

61

Condensation of fluorescent nanoparticles using a DEP chip with a dot-electrode array

Chuang, Cheng-Hsin, Huang, Yao-Wei

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.46 MB

english, 2012

62

Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramic

Grossenbacher, Jonas, Gullo, Maurizio R., Grandjean, Raphaël, Kiefer, Thomas, Brugger, Jürgen

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 514 KB

english, 2012

63

Micromachined self-actuated piezoresistive cantilever for high speed SPM

Michels, Thomas, Guliyev, Elshad, Klukowski, Michal, W. Rangelow, Ivo

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 673 KB

english, 2012

64

Thermal properties of nanocapsules measured by scanning force microscopy methods

Kaule, Tassilo, Hamberger, Anika, Zhang, Yi, Landfester, Katharina, Butt, Hans-Jürgen, Berger, Rüdiger

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 476 KB

english, 2012

65

Biomimetic soft lithography on curved nanostructured surfaces

Auzelyte, V., Flauraud, V., Cadarso, V.J., Kiefer, T., Brugger, J.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 571 KB

english, 2012

66

Effects of a bottom electrode on feed-through capacitance and electrical transmission of an MEMS resonator

Kim, J.-M., Park, H.-W., Jeong, H.-G., Kim, Y.-K.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 822 KB

english, 2012

67

Development of an adhesive testing method for two-dimensional fine pattern on silicon substrate using a photoresist column

Ishiyama, Chiemi, Miyasaka, Chiaki, Park, Ik-Keun

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 591 KB

english, 2012

68

S-shaped double-spring structures for high stiffness and spring height

Hantschel, T., Chow, E.M.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 614 KB

english, 2012

69

Performance evaluation of carbon nanotube-based oscillators and bearings under electron irradiation: Molecular dynamics study

Yasuda, Masaaki, Chihara, Yoshinori, Mimura, Ryosuke, Kimoto, Yoshihisa, Kawata, Hiroaki, Hirai, Yoshihiko

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.71 MB

english, 2012

70

EWOD-driven stirring in lab-on-a-chips: Dependence on the electrodes’ geometry

Malk, R., Theisen, J., Fouillet, Y., Davoust, L.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 705 KB

english, 2012

71

Optimized marker definition for high overlay accuracy e-beam lithography

Moers, J., Trellenkamp, St., Grützmacher, D., Offenhäusser, A., Rienks, B.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 705 KB

english, 2012

72

Optimization of surface plasmon polariton generation in a nanocone through linearly polarized laser beams

Malerba, M., Alabastri, A., Cojoc, G., Francardi, M., Perrone Donnorso, M., Proietti Zaccaria, R., De Angelis, F., Di Fabrizio, E.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 707 KB

english, 2012

73

Precision assembly of a miniaturized wire deflector for electron-beam lithography

Risse, Stefan, Damm, Christoph, Hornaff, Marcel, Kamm, Andreas, Mohaupt, Matthias, Eberhardt, Ramona, Schmidt, Ingo, Ramm, Roland, Kühmstedt, Peter, Notni, Gunther, Döring, Hans-Joachim, Elster, Thoma

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 666 KB

english, 2012

74

Inside Front Cover - Editorial Board

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 25 KB

english, 2012

75

Fabrication process development for a high sensitive electrochemical IDA sensor

Partel, S., Mayer, M., Hudek, P., Dinçer, C., Kieninger, J., Urban, G.A., Motzek, K., Matay, L.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 985 KB

english, 2012

76

High resolution and high density ion beam lithography employing HSQ resist

Bruchhaus, L., Bauerdick, S., Peto, L., Barth, U., Rudzinski, A., Mussmann, J., Klingfus, J., Gierak, J., Hövel, H.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 655 KB

english, 2012

77

Tailored Ag nanoparticles/nanoporous superhydrophobic surfaces hybrid devices for the detection of single molecule

Gentile, F., Coluccio, M.L., Accardo, A., Marinaro, G., Rondanina, E., Santoriello, S., Marras, S., Das, G., Tirinato, L., Perozziello, G., De Angelis, F., Dorigoni, C., Candeloro, P., Di Fabrizio, E.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 599 KB

english, 2012

78

PFPE-based materials for the fabrication of micro- and nano-optical components

Gómez, Manuel, Lazzari, Massimo

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 611 KB

english, 2012

79

Fluctuations of the mass adsorbed on microcantilever sensor surface in liquid-phase chemical and biochemical detection

Jokić, Ivana, Djurić, Zoran, Frantlović, Miloš, Radulović, Katarina, Krstajić, Predrag

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 566 KB

english, 2012

80

2D photonic gratings from thermal imprinting of ITO-based films

Brigo, Laura, Mattei, Giovanni, Michieli, Niccolò, Brusatin, Giovanna

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.00 MB

english, 2012

81

Time efficient fabrication of ultra large scale nano dot arrays using electron beam lithography

Grebing, Jochen, Faßbender, Jürgen, Erbe, Artur

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 503 KB

english, 2012

82

Vertically stacked Si nanostructures for biosensing applications

Buitrago, Elizabeth, Fernández-Bolaños, M., Ionescu, A.M.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 768 KB

english, 2012

83

Roll-to-roll pilot nanoimprinting process for backlight devices

Mäkelä, Tapio, Haatainen, Tomi

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 582 KB

english, 2012

84

Laterally grown ZnO nanorod arrays on an obliquely deposited seed layer and its UV photocurrent response

Kim, Myoung-Soo, Han, Jang-Hwan, Lee, Da-Hyeok, O, Beom-Hoan, Lee, Seung-Gol, Lee, El-Hang, Park, Se-Geun

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 872 KB

english, 2012

85

Extremely thin planarized grating for sub-diffraction (

Cattoni, A., Talneau, A., Haghiri-Gosnet, A.M., Girard, J., Sentenac, A.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 421 KB

english, 2012

86

Immersion nanoimprint lithography using perfluoroalkyl liquid

Mekaru, Harutaka, Hiroshima, Hiroshi

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.34 MB

english, 2012

87

Nanostructured silicon for Ge nanoheteroepitaxy

Bauer, J., Yamamoto, Y., Zaumseil, P., Fursenko, O., Schulz, K., Kozlowski, G., Schubert, M.A., Schroeder, T., Tillack, B.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 743 KB

english, 2012

88

Fabrication of roll mold using electron-beam direct writing and metal lift-off process

Maruyama, Hiroki, Unno, Noriyuki, Taniguchi, Jun

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.31 MB

english, 2012

89

Development of novel dual-axis sensing gyroscope using surface acoustic wave

Oh, Haekwan, Lee, Ki Jung, Yang, Sang Sik, Lee, Keekeun

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1.06 MB

english, 2012

90

Ta/TiN midgap full-metal single gate fabrication using combined chlorine-based plasma and highly selective chemical metal etching for decananometer CMOS technology

Chen, Zhenkun, Dubois, Emmanuel, Ravaux, Florent, Danneville, Francois

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 544 KB

english, 2012

91

Author Index

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 145 KB

english, 2012

92

Beam induced deposition of 3D electrodes to improve coupling to cells

Martiradonna, Luigi, Quarta, Luca, Sileo, Leonardo, Schertel, Andreas, Maccione, Alessandro, Simi, Alessandro, Dante, Silvia, Scarpellini, Alice, Berdondini, Luca, De Vittorio, Massimo

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 510 KB

english, 2012

93

Mid-infrared nanoantenna arrays on silicon and CaF2 substrates for sensing applications

Businaro, L., Limaj, O., Giliberti, V., Ortolani, M., Di Gaspare, A., Grenci, G., Ciasca, G., Gerardino, A., de Ninno, A., Lupi, S.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 602 KB

english, 2012

94

Optimization and characterization of Au cuboid nanostructures as a SERS device for sensing applications

Chirumamilla, M., Das, G., Toma, A., Gopalakrishnan, A., Zaccaria, R. Proietti, Liberale, C., De Angelis, F., Di Fabrizio, E.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 565 KB

english, 2012

95

TiN scanning probes for electrical profiling of nanoelectronics device structures

Hantschel, T., Schulze, A., Celano, U., Moussa, A., Arstila, K., Eyben, P., Majeed, B., Tezcan, D.S., Werner, T., Vandervorst, W.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 1015 KB

english, 2012

96

Direct wafer bonding for encapsulation of fused silica optical gratings

Kalkowski, G., Zeitner, U., Benkenstein, T., Fuchs, J., Rothhardt, C., Eberhardt, R.

Journal:

Microelectronic Engineering

Year:

2012

Language:

english

File:

PDF, 851 KB

english, 2012