Characterization of AlN/SiC Epitaxial Wafers Fabricated by Hydride Vapour Phase Epitaxy
Yu. Melnik, D. Tsvetkov, A. Pechnikov, I. Nikitina, N. Kuznetsov, V. DmitrievVolume:
188
Year:
2001
Language:
english
Pages:
4
DOI:
10.1002/1521-396x(200111)188:13.0.co;2-h
File:
PDF, 98 KB
english, 2001