![](/img/cover-not-exists.png)
High on/off current ratio AlGaN/GaN MOS-HEMTs employing RF-sputtered HfO 2 gate insulators
Seok, Ogyun, Ahn, Woojin, Han, Min-Koo, Ha, Min-WooVolume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/2/025001
Date:
February, 2013
File:
PDF, 812 KB
english, 2013