The effects of the pressure and the oxygen content of the...

The effects of the pressure and the oxygen content of the sputtering gas on the structure and the properties of zinc oxy-nitride thin films deposited by reactive sputtering of zinc

Jiang, Nanke, Georgiev, Daniel G, Jayatissa, Ahalapitiya H
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Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/2/025009
Date:
February, 2013
File:
PDF, 2.23 MB
english, 2013
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