Unexpected surface implanted layer in static random access...

Semiconductor Science and Technology 2013 / 02 Vol. 28; Iss. 2

Unexpected surface implanted layer in static random access memory devices observed by microwave impedance microscope

Kundhikanjana, W, Yang, Y, Tanga, Q, Zhang, K, Lai, K, Ma, Y, Kelly, M A, Li, X X, Shen, Z-X
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Volume:
28
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/28/2/025010
Date:
February, 2013
File:
PDF, 858 KB
english, 2013
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