Bulk silicon micromachining for MEMS in optical...

Journal of Micromechanics and Microengineering 2002 / 7 Vol. 12; Iss. 4

Bulk silicon micromachining for MEMS in optical communication systems

Hoffmann, Martin, Voges, Edgar
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Volume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/4/301
Date:
July, 2002
File:
PDF, 813 KB
english, 2002
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