Volume 12; Issue 4

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Journal of Micromechanics and Microengineering
Volume 12; Issue 4

Journal of Micromechanics and Microengineering

Volume 12; Issue 4

1

Self-aligning gas/liquid micropump

Schabmueller, C G J, Koch, M, Mokhtari, M E, Evans, A G R, Brunnschweiler, A, Sehr, H

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 248 KB

english, 2002

2

Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions

Pamidighantam, Sayanu, Puers, Robert, Baert, Kris, Tilmans, Harrie A C

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 282 KB

english, 2002

3

Bulk silicon micromachining for MEMS in optical communication systems

Hoffmann, Martin, Voges, Edgar

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 813 KB

english, 2002

4

A 32-site neural recording probe fabricated by DRIE of SOI substrates

Norlin, Peter, Kindlundh, Maria, Mouroux, Aliette, Yoshida, Ken, Hofmann, Ulrich G

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 667 KB

english, 2002

5

Through-wafer copper electroplating for three-dimensional interconnects

Nguyen, N T, Boellaard, E, Pham, N P, Kutchoukov, V G, Craciun, G, Sarro, P M

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 1.07 MB

english, 2002

6

Electrodeposited Co-Ni alloys for MEMS

Duch, M, Esteve, J, G$oacute$mez, E, P$eacute$rez-Castillejos, R, Vall$eacute$s, E

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 245 KB

english, 2002

7

Low-cost thermoforming of micro fluidic analysis chips

Truckenm$uuml$ller, R, Rummler, Z, Schaller, Th, Schomburg, W K

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 507 KB

english, 2002

8

Polyimide sacrificial layer and novel materials for post-processing surface micromachining

Bagolini, A, Pakula, L, Scholtes, T L M, Pham, H T M, French, P J, Sarro, P M

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 392 KB

english, 2002

9

SU-8 thick photoresist processing as a functional material for MEMS applications

Conradie, Ewan H, Moore, David F

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 804 KB

english, 2002

10

Development of tools for handling and assembling microcomponents

Ansel, Y, Schmitz, F, Kunz, S, Gruber, H P, Popovic, G

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 1.45 MB

english, 2002

11

Thick photoresist development for the fabrication of high aspect ratio magnetic coils

Brunet, Magali, O$apos$Donnell, Terence, O$apos$Brien, Joe, McCloskey, Paul, Mathuna, Se$aacute$n Cian $Oacute$

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 618 KB

english, 2002

12

A new transferred ultra-thin silicon micropackaging

Chen, Jen-Yi, Huang, Long-Sun, Chu, Chia-Hua, Peizen, Chang

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 189 KB

english, 2002

13

Titanium as a micromechanical material

O$apos$Mahony, C, Hill, M, Hughes, P J, Lane, W A

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 363 KB

english, 2002

14

Development of a microfluidic device for fluorescence activated cell sorting

Kr$uuml$ger, Jan, Singh, Kirat, O$apos$Neill, Alan, Jackson, Carl, Morrison, Alan, O$apos$Brien, Peter

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 579 KB

english, 2002

15

Protection of MOS capacitors during anodic bonding

Schj$oslash$lberg-Henriksen, K, Plaza, J A, Raf$iacute$, J M, Esteve, J, Campabadal, F, Santander, J, Jensen, G U, Hanneborg, A

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 224 KB

english, 2002

16

Micromachining of silicon carbide on silicon fabricated by low-pressure chemical vapour deposition

Behrens, Ingo, Peiner, Erwin, Bakin, Andrey S, Schlachetzki, Andreas

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 273 KB

english, 2002

17

Postbuckled micromachined square membranes under differential pressure

Kramer, Torsten, Paul, Oliver

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 316 KB

english, 2002

18

Temperature influence on etching deep holes with SF6/O2 cryogenic plasma

Craciun, G, Blauw, M A, Drift, E van der, Sarro, P M, French, P J

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 365 KB

english, 2002

19

Materials and processing for realization of micro-hotplates operated at elevated temperature

F$uuml$rjes, P, V$iacute$zv$aacute$ry, Zs, $Aacute$d$aacute$m, M, B$aacute$rsony, I, Morrissey, A, D$uuml$cso, Cs

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 265 KB

english, 2002

20

Influence of Ge implantation on the mechanical properties of polycrystalline silicon microstructures

Polymenakos, Stylianos, Stergiou, Vassiliki C, Kontos, Athanassios G, Tsamis, Christos, Raptis, Yannis S, Tsoukalas, Dimitris

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 380 KB

english, 2002

21

Preface

Journal:

Journal of Micromechanics and Microengineering

Year:

2002

Language:

english

File:

PDF, 295 KB

english, 2002