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In situ etching of GaAs using AsCl3 in MOVPE. I
Belgacem El Jani, Jean-Claude Grenet, Maurice Guittard, Bachir SenouciVolume:
58
Year:
1982
Language:
english
Pages:
6
DOI:
10.1016/0022-0248(82)90285-8
File:
PDF, 880 KB
english, 1982