Surface defects in GaAs wafer processes

Journal of Crystal Growth 1990 Vol. 103; Iss. 1-4

Surface defects in GaAs wafer processes

H. Matsushita, M. Ishida, J. Kikawa
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
103
Year:
1990
Language:
english
Pages:
8
DOI:
10.1016/0022-0248(90)90225-a
File:
PDF, 435 KB
english, 1990
Conversion to is in progress
Conversion to is failed