Detailed models of the MOVPE process
Klavs F. Jensen, Dimitrios I. Fotiadis, Triantafillos J. MountziarisVolume:
107
Year:
1991
Language:
english
Pages:
11
DOI:
10.1016/0022-0248(91)90428-8
File:
PDF, 812 KB
english, 1991