Atmospheric pressure atomic layer epitaxy: mechanisms and applications
P. Daniel Dapkus, B.Y. Maa, Q. Chen, W.G. Jeong, S.P. DenBaarsVolume:
107
Year:
1991
Language:
english
Pages:
10
DOI:
10.1016/0022-0248(91)90437-a
File:
PDF, 813 KB
english, 1991